| Item type |
学術雑誌論文 / Journal Article(1) |
| 公開日 |
2008-03-12 |
| タイトル |
|
|
タイトル |
Inference of Current density on Microstructure of Electroplated Cu Thin Film |
|
言語 |
en |
| 言語 |
|
|
言語 |
eng |
| 主題 |
|
|
言語 |
en |
|
主題Scheme |
Other |
|
主題 |
Cu electroplating |
| 主題 |
|
|
言語 |
en |
|
主題Scheme |
Other |
|
主題 |
thin film |
| 主題 |
|
|
言語 |
en |
|
主題Scheme |
Other |
|
主題 |
grain size |
| 主題 |
|
|
言語 |
en |
|
主題Scheme |
Other |
|
主題 |
current density |
| 資源タイプ |
|
|
資源タイプ識別子 |
http://purl.org/coar/resource_type/c_6501 |
|
資源タイプ |
journal article |
| アクセス権 |
|
|
アクセス権 |
open access |
|
アクセス権URI |
http://purl.org/coar/access_right/c_abf2 |
| 作成者 |
MASAI, T
TAKASUGI, K
CHOKI, K-K
Sato, S
|
| 内容記述 |
|
|
内容記述タイプ |
Abstract |
|
内容記述 |
In this paper, we report micro-structural characteristics of electroplated Cu thin films with the variation of the current density applied during the electroplating process. We evaluated the surface roughness, the crystalline texture, the resistivity, and the grain size of the thin film in a wide range of current density (50― 1000A/m2). The surface roughness and the resistivity were increased according to the increment of the current density. The <111> textured structure was also pronounced as the current density was increased. The scanning ion microscope (SIM) image of the cross-sectional samples revealed that grain size of the film prepared in a high current density was much smaller (0.05～0.5μm) than that of the thin film in a low current density (l～2μm). These results are different from the film prepared by a sputtering process, where a smooth surface was observed in a small grain-sized (<0.1μm) film. |
|
言語 |
en |
| 内容記述 |
|
|
内容記述タイプ |
Other |
|
内容記述 |
ICMR2005 |
|
言語 |
en |
| 出版タイプ |
|
|
出版タイプ |
VoR |
|
出版タイプResource |
http://purl.org/coar/version/c_970fb48d4fbd8a85 |
| 書誌情報 |
en : International Journal of the Society of Materials Engineering for Resources
巻 13,
号 2,
p. 96-99,
発行日 2006-03-01
|
| 収録物識別子 |
|
|
収録物識別子タイプ |
PISSN |
|
収録物識別子 |
1347-9725 |
| 収録物識別子 |
|
|
収録物識別子タイプ |
NCID |
|
収録物識別子 |
AA1095475X |
| 出版者 |
|
|
出版者 |
The Society of Materilas Engineering for resources of Japan |
|
言語 |
en |
| 関連情報 |
|
|
関連タイプ |
isIdenticalTo |
|
|
識別子タイプ |
DOI |
|
|
関連識別子 |
https://doi.org/10.5188/ijsmer.13.96 |
ijsmer13-2n.pdf (1.3 MB)
