2026-03-08T04:28:28Z https://air.repo.nii.ac.jp/oai

oai:air.repo.nii.ac.jp:00000913 2024-08-25T18:14:22Z 590:664:671:677

3D Field Simulation of Magnetic Thin Film Inductor FUJIWARA, Toshiyasu CHOI, Kyung-Ku SATO, Shigeki open access Thin film inductor Magnetic thin film Eddy current The 3D magnetic field simulations with FEM (finite element method) have been performed to predictand understand the performance of Magnetic Thin Film Inductor (MTFl). Inductor structures of planar electroplated Cu spiralcoil, which are sandwiched and underlaid with magnetic thin films, are considered as the simulation models. The inductance increment of 300% compared to air-core inductor was predicted when the sandwiched 5μm thickness magnetic thin film with relative permeability of 600 was adopted. Impedance measurement for the fabricated MTFI showed a good agreement with the simulation result. We also found that the undesirable increment of resistance at high frequency was originated from the eddy current flow through magnetic thin film. ICMR2005 The Society of Materilas Engineering for resources of Japan 2006-03-01 eng journal article VoR http://hdl.handle.net/10295/703 https://air.repo.nii.ac.jp/records/913 https://doi.org/10.5188/ijsmer.13.105 1347-9725 AA1095475X International Journal of the Society of Materials Engineering for Resources 13 2 105 108 https://air.repo.nii.ac.jp/record/913/files/ijsmer13-2p.pdf application/pdf 524.5 kB 2017-02-16